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Proceedings Paper

Development of a strain visualization system for microstructures using single fluorescent molecule tracking on a three-dimensional orientation microscope
Author(s): Shintaro Yoshida; Keisuke Yoshiki; Takahiro Namazu; Nozomu Araki; Mamoru Hashimoto; Makoto Kurihara; Nobuyuki Hashimoto; Shozo Inoue
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Paper Abstract

We propose a technique that employs single fluorescent molecules for visualizing the distribution of strain induced in microstructures. We sprayed single-molecule tracers on microstructures by ultrasonic atomization and traced the position and orientation of the tracers by a single-molecule detection technique with a three-dimensional (3D) orientation microscope, which consists of a conventional fluorescent microscope and a polarization-mode converter. By using 3D spline interpolation, we visualized the surface geometry of a microelectromechanical (MEMS) device. We tracked the 3D position and orientation of tracers attached to a supporting beam of the MEMS mirror. The surface declination angles calculated from the orientation of the tracers were in agreement with the tilt angle obtained from the 3D position of the tracers.

Paper Details

Date Published: 22 September 2011
PDF: 7 pages
Proc. SPIE 8134, Optics and Photonics for Information Processing V, 81340E (22 September 2011); doi: 10.1117/12.894329
Show Author Affiliations
Shintaro Yoshida, Univ. of Hyogo (Japan)
Keisuke Yoshiki, Univ. of Hyogo (Japan)
Takahiro Namazu, Univ. of Hyogo (Japan)
Nozomu Araki, Univ. of Hyogo (Japan)
Mamoru Hashimoto, Osaka Univ. (Japan)
Makoto Kurihara, Citizen Holdings Co. Ltd. (Japan)
Nobuyuki Hashimoto, Citizen Holdings Co. Ltd. (Japan)
Shozo Inoue, Univ. of Hyogo (Japan)


Published in SPIE Proceedings Vol. 8134:
Optics and Photonics for Information Processing V
Khan M. Iftekharuddin; Abdul Ahad Sami Awwal, Editor(s)

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