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Proceedings Paper

Tunable Stoichiometry of BCxNy Thin-Films through Multi-Target PLD with In situ Ellipsometry
Author(s): John G. Jones; Rachel Jakubiak; Adam R. Waite; Lirong Sun; Matt Lange; Neil R. Murphy
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Paper Details

Date Published:
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Proc. SPIE 8104, Nanostructured Thin Films IV, 81040S; doi: 10.1117/12.894236
Show Author Affiliations
John G. Jones, Air Force Research Lab. (United States)
Rachel Jakubiak, Air Force Research Lab. (United States)
Adam R. Waite, Air Force Research Lab. (United States)
Lirong Sun, Air Force Research Lab. (United States)
Matt Lange, Air Force Institute of Technology (United States)
Neil R. Murphy, Air Force Research Lab. (United States)


Published in SPIE Proceedings Vol. 8104:
Nanostructured Thin Films IV
Raúl J. Martín-Palma; Yi-Jun Jen; Tom G. Mackay, Editor(s)

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