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Proceedings Paper

Swing arm optical CMM: self calibration with dual probe shear test
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Paper Abstract

Swing arm optical CMM (SOC), a profilometer with distance measuring interferometric probe for in situ measurement of the topography of aspheric has been used for measuring highly aspheric mirrors with a performance rivaling full aperture interferometric tests. Recently, we implemented a dual probe self calibration mode for the SOC. Data from the dual probes can be used to calibrate the swing-arm air bearing errors since both probes see the same bearing errors while measuring different portions of the test surface. Bearing errors are reconstructed from the shear signal with a modal estimation.

Paper Details

Date Published: 27 September 2011
PDF: 7 pages
Proc. SPIE 8126, Optical Manufacturing and Testing IX, 81260W (27 September 2011); doi: 10.1117/12.894203
Show Author Affiliations
Peng Su, College of Optical Sciences, The Univ. of Arizona (United States)
Yuhao Wang, College of Optical Sciences, The Univ. of Arizona (United States)
Chang Jin Oh, College of Optical Sciences, The Univ. of Arizona (United States)
Robert E. Parks, College of Optical Sciences, The Univ. of Arizona (United States)
James H. Burge, College of Optical Sciences, The Univ. of Arizona (United States)


Published in SPIE Proceedings Vol. 8126:
Optical Manufacturing and Testing IX
James H. Burge; Oliver W. Fähnle; Ray Williamson, Editor(s)

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