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Proceedings Paper

Quantification of the systematic and random measurement uncertainty of a polarimetric scatterometry system designed for enhanced E-field device characterization
Author(s): Thomas M. Fitzgerald; Michael Marciniak; Stephen Nauyoks
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Proc. SPIE 8105, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors V, 81050B; doi: 10.1117/12.894062
Show Author Affiliations
Thomas M. Fitzgerald, Univ. of Dayton Research Institute (United States)
Michael Marciniak, Air Force Institute of Technology (United States)
Stephen Nauyoks, Air Force Institute of Technology (United States)


Published in SPIE Proceedings Vol. 8105:
Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors V
Michael T. Postek, Editor(s)

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