Share Email Print
cover

Proceedings Paper

Automated suppression of errors in LTP-II slope measurements with x-ray optics
Author(s): Zulfiqar Ali; Nikolay A. Artemiev; Curtis L. Cummings; Edward E. Domning; Nicholas Kelez; Wayne R. McKinney; Daniel J. Merthe; Gregory Y. Morrison; Brian V. Smith; Valeriy V. Yashchuk
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Systematic error and instrumental drift are the major limiting factors of sub-microradian slope metrology with state-of-the-art x-ray optics. Significant suppression of the errors can be achieved by using an optimal measurement strategy suggested in [Rev. Sci. Instrum. 80, 115101 (2009)]. Here, we report on development of an automated, kinematic, rotational system that provides fully controlled flipping, tilting, and shifting of a surface under test. The system is to be integrated into the Advanced Light Source long trace profiler, LTP-II, allowing for complete realization of the advantages of the optimal measurement strategy method. We describe in detail the system's specification, design operational control and data acquisition. The performance of the system is demonstrated via the results of high precision measurements with a number of super-polished mirrors.

Paper Details

Date Published: 23 September 2011
PDF: 15 pages
Proc. SPIE 8141, Advances in Computational Methods for X-Ray Optics II, 81410O (23 September 2011); doi: 10.1117/12.894061
Show Author Affiliations
Zulfiqar Ali, Lawrence Berkeley National Lab. (United States)
Optics Lab. (Pakistan)
Nikolay A. Artemiev, Lawrence Berkeley National Lab. (United States)
Curtis L. Cummings, Lawrence Berkeley National Lab. (United States)
Edward E. Domning, Lawrence Berkeley National Lab. (United States)
Nicholas Kelez, Lawrence Berkeley National Lab. (United States)
Wayne R. McKinney, Lawrence Berkeley National Lab. (United States)
Daniel J. Merthe, Lawrence Berkeley National Lab. (United States)
Gregory Y. Morrison, Lawrence Berkeley National Lab. (United States)
Brian V. Smith, Lawrence Berkeley National Lab. (United States)
Valeriy V. Yashchuk, Lawrence Berkeley National Lab. (United States)


Published in SPIE Proceedings Vol. 8141:
Advances in Computational Methods for X-Ray Optics II
Manuel Sanchez del Rio; Oleg Chubar, Editor(s)

© SPIE. Terms of Use
Back to Top