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Proceedings Paper

Surface sensitivity reduction in laser triangulation sensors
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Paper Abstract

Laser triangulation sensors offer a simple, non-contact and fast solution to measure displacement, position, vibration and thickness. However, these sensors are prone to target surface sensitivity since they rely heavily on a uniform back-scatter of the laser spot. Here, sources of measurement noise including surface texture, speckle, beam deflection and asymmetry are discussed. In addition, a few solutions using dithering as well as the beam shaping to reduce surface sensitivity are explored. It is shown that a simple ditherer would induce additional error and a solution is suggested to compensate for it.

Paper Details

Date Published: 14 September 2011
PDF: 9 pages
Proc. SPIE 8133, Dimensional Optical Metrology and Inspection for Practical Applications, 81330O (14 September 2011); doi: 10.1117/12.893893
Show Author Affiliations
Mehdi Daneshpanah, GE Global Research (United States)
Kevin Harding, GE Global Research (United States)


Published in SPIE Proceedings Vol. 8133:
Dimensional Optical Metrology and Inspection for Practical Applications
Kevin G. Harding; Peisen S. Huang; Toru Yoshizawa, Editor(s)

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