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Proceedings Paper

Optical properties of metal coated nanoscrew Si
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Paper Abstract

In this paper, a unique nanoscrew Si structure is presented. The nanoscrew surface is made by anodized aluminum oxide (AAO) mask formation followed by extended deep reactive ionic etching (DRIE). Dense random zig-zag pillar structures that represent screw shapes are formed, with 1 um in height and the bottom base width ranging from 100 nm to 250 nm. The tip of the nanoscrews have radius of curvature even lower than 10 nm. The apparent naked-eye view of the nanoscrew surface, which only consists of nanopatterned N-type single crystalline Si is diffusively green. The optical properties of nanoscrew Si with and without metal deposition is presented as discussion in applications for SERS.

Paper Details

Date Published: 20 September 2011
PDF: 6 pages
Proc. SPIE 8096, Plasmonics: Metallic Nanostructures and Their Optical Properties IX, 809630 (20 September 2011); doi: 10.1117/12.893657
Show Author Affiliations
Hyunjong Jin, Univ. of Illinois at Urbana-Champaign (United States)
Logan Gang Liu, Univ. of Illinois at Urbana-Champaign (United States)


Published in SPIE Proceedings Vol. 8096:
Plasmonics: Metallic Nanostructures and Their Optical Properties IX
Mark I. Stockman, Editor(s)

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