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Proceedings Paper

Optimal correction and feedforward control of low-order aberrations with piezoelectric and membrane deformable mirrors
Author(s): Gleb Vdovin; Oleg Soloviev; Mikhail Loktev; Slava Savenko; Lukasz Dziechciarczyk
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Paper Abstract

By analysis of the mechanical equations, describing deformable mirrors, we show that the print-through is the natural property of a deformable mirror, which is completely defined by the geometry and mechanics of deformation. The print-through causes increased scattering in imaging applications, and can result in hot/cold spots in laser applications. Further development of adaptive optics for extreme UV applications would also require to address the print-through problem. We describe different ways to reduce, or completely eliminate the print-through in continuous faceplate and membrane deformable mirrors. In combination with simple hysteresis compensation, our approach allows for high-precision feedforward control of these deformable mirrors, directly in terms of Zernike modes.

Paper Details

Date Published: 13 September 2011
PDF: 10 pages
Proc. SPIE 8165, Unconventional Imaging, Wavefront Sensing, and Adaptive Coded Aperture Imaging and Non-Imaging Sensor Systems, 81650W (13 September 2011); doi: 10.1117/12.893496
Show Author Affiliations
Gleb Vdovin, Flexible Optical B.V. (Netherlands)
Oleg Soloviev, Flexible Optical B.V. (Netherlands)
Mikhail Loktev, Flexible Optical B.V. (Netherlands)
Slava Savenko, Flexible Optical B.V. (Netherlands)
Lukasz Dziechciarczyk, Flexible Optical B.V. (Netherlands)
Politechnika Wroclawska (Poland)


Published in SPIE Proceedings Vol. 8165:
Unconventional Imaging, Wavefront Sensing, and Adaptive Coded Aperture Imaging and Non-Imaging Sensor Systems
Stanley Rogers; Jean J. Dolne; David P. Casasent; Thomas J. Karr; Victor L. Gamiz, Editor(s)

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