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Proceedings Paper

Fourier planes vs. Scheimpflug principle in microscopic and scatterometric devices
Author(s): Cornelius Hahlweg; Wenjing Zhao; Hendrik Rothe
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Paper Abstract

The present paper is understood as a continuation of our paper on the utilization of the Scheimpflug-principle in scatterometric devices. Imaging scatterometers in principle gather the fourier image of the illuminated spot, which in microscopy would be the primary diffraction image. Therefore imaging scatterometers can be used as microscopes as well, which only requires an additional positive lens or equivalent mirror. It is obvious that combined designs are interesting in surface inspection: because of the loss of phase information in both direct and scatter image, there is still non redundant information besides the intersection set of both images. For the design of such combined devices it is of high interest to identify the fourier images. While a more or less paraxial dioptric device in orthogonal view has well defined fourier planes, in an off axis device with paraboloid or elliptical mirrors the fourier image is concerned by the Scheimpflug relations, which shall be subject of the present paper.

Paper Details

Date Published: 16 September 2011
PDF: 7 pages
Proc. SPIE 8127, Optical Modeling and Performance Predictions V, 812708 (16 September 2011); doi: 10.1117/12.893470
Show Author Affiliations
Cornelius Hahlweg, Helmut Schmidt Univ. (Germany)
Wenjing Zhao, Helmut Schmidt Univ. (Germany)
Hendrik Rothe, Helmut Schmidt Univ. (Germany)

Published in SPIE Proceedings Vol. 8127:
Optical Modeling and Performance Predictions V
Mark A. Kahan, Editor(s)

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