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Proceedings Paper

Low noise surface mapping of transparent plane-parallel parts with a low coherence interferometer
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Paper Abstract

A new instrument for measurements of thin transparent flats incorporates a novel in-line normal-incidence equal path interferometer, and extended broad-band illumination to isolate the surface of interest while reducing coherent noise and artifacts. Incorporating a 4Mpix camera, matching high resolution imaging system and vibration robust design; the instrument satisfies the needs of current and future hard disk and pellicle metrology.

Paper Details

Date Published: 14 September 2011
PDF: 9 pages
Proc. SPIE 8133, Dimensional Optical Metrology and Inspection for Practical Applications, 81330G (14 September 2011); doi: 10.1117/12.893461
Show Author Affiliations
Leslie L. Deck, Zygo Corp. (United States)
Peter J. de Groot, Zygo Corp. (United States)

Published in SPIE Proceedings Vol. 8133:
Dimensional Optical Metrology and Inspection for Practical Applications
Kevin G. Harding; Peisen S. Huang; Toru Yoshizawa, Editor(s)

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