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Proceedings Paper

High precision surface-profile metrology by scanning the repetition rate of femtosecond pulses
Author(s): Woo-Deok Joo; Young-Jin Kim; Yunseok Kim; Jiyong Park; Seung-Woo Kim
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Paper Abstract

We report high-precision surface-profile metrology using a femtosecond pulse laser as a low-coherence interferometric light source. Unequal-path non-symmetric interferometer is configured to test a large-sized optics with a small reference mirror, which is only feasible through ultra-short mode-locked pulses with repeated periodic temporal coherence and high spatial coherence. The temporal delay between pulses from the reference and the target optics is precisely scanned by tuning the repetition rate of femtosecond pulses. This method enables us to perform high precision surface metrology without parasitic effects by stray reflections and remove all the moving parts in an interferometer.Ab

Paper Details

Date Published: 20 September 2011
PDF: 6 pages
Proc. SPIE 8105, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors V, 810507 (20 September 2011); doi: 10.1117/12.893278
Show Author Affiliations
Woo-Deok Joo, Korea Advanced Institute of Science and Technology (Korea, Republic of)
Young-Jin Kim, Korea Advanced Institute of Science and Technology (Korea, Republic of)
Yunseok Kim, Korea Advanced Institute of Science and Technology (Korea, Republic of)
Jiyong Park, Korea Advanced Institute of Science and Technology (Korea, Republic of)
Seung-Woo Kim, Korea Advanced Institute of Science and Technology (Korea, Republic of)


Published in SPIE Proceedings Vol. 8105:
Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors V
Michael T. Postek, Editor(s)

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