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Proceedings Paper

Hard x-ray nano-beam characterization by ptychographic imaging
Author(s): Christian G. Schroer; Susanne Hönig; Andy Goldschmidt; Robert Hoppe; Jens Patommel; Dirk Samberg; Andreas Schropp; Frank Seiboth; Sandra Stephan; Sebastian Schöder; Manfred Burghammer; Melissa Denecke; Gerd Wellenreuther; Gerald Falkenberg
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Paper Abstract

Modern hard x-ray scanning microscopes generate x-ray beams with lateral sizes well below 100 nm. Characterizing these beams in terms of shape and size by conventional techniques is tedious, requires highly accurate test objects and stages, and yields only incomplete information. Since recently, we use a ptychographic scanning coherent diffraction imaging technique in order to characterize hard x-ray nano beams in x-ray scanning microscopes, obtaining a detailed quantitative picture of the complex wave field in the nano focus and allowing one to reconstruct the exit wave field behind the nano-focusing optic, giving detailed insight into its aberrations.

Paper Details

Date Published: 23 September 2011
PDF: 10 pages
Proc. SPIE 8141, Advances in Computational Methods for X-Ray Optics II, 814103 (23 September 2011); doi: 10.1117/12.893055
Show Author Affiliations
Christian G. Schroer, Technische Univ. Dresden (Germany)
Susanne Hönig, Technische Univ. Dresden (Germany)
Andy Goldschmidt, Technische Univ. Dresden (Germany)
Robert Hoppe, Technische Univ. Dresden (Germany)
Jens Patommel, Technische Univ. Dresden (Germany)
Dirk Samberg, Technische Univ. Dresden (Germany)
Andreas Schropp, Technische Univ. Dresden (Germany)
Frank Seiboth, Technische Univ. Dresden (Germany)
Sandra Stephan, Technische Univ. Dresden (Germany)
Sebastian Schöder, European Synchrotron Radiation Facility (France)
Synchrotron SOLEIL (France)
Manfred Burghammer, European Synchrotron Radiation Facility (France)
Melissa Denecke, Karlsruhe Institute of Technology (Germany)
Gerd Wellenreuther, Deutsches Elektronen-Synchrotron (Germany)
Gerald Falkenberg, Deutsches Elektronen-Synchrotron (Germany)


Published in SPIE Proceedings Vol. 8141:
Advances in Computational Methods for X-Ray Optics II
Manuel Sanchez del Rio; Oleg Chubar, Editor(s)

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