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Proceedings Paper

Development of a one-dimensional Wolter mirror for achromatic full-field x-ray microscopy
Author(s): S. Matsuyama; N. Kidani; H. Mimura; J. Kim; Y. Sano; K. Tamasaku; Y. Kohmura; M. Yabashi; T. Ishikawa; K. Yamauchi
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Paper Abstract

We investigated a one-dimensional Wolter mirror (which consists of an elliptical mirror and a hyperbolic mirror) with the aim of developing an achromatic full-field X-ray microscope with a resolution of better than 50 nm. X-ray mirrors were ultraprecisely fabricated by elastic emission machining to give a figure accuracy of 2 nm (peak-to-valley). A one-dimensional Wolter mirror that had been precisely constructed was evaluated in terms of the point-spread function at the center of the field of view (FOV) and the FOV at an X-ray energy of 11.5 keV at BL29XUL of SPring-8. It was found to have a minimum resolution of 43 nm and a FOV equivalent to 12.1 μm. These results are highly consistent with calculation results.

Paper Details

Date Published: 28 September 2011
PDF: 7 pages
Proc. SPIE 8139, Advances in X-Ray/EUV Optics and Components VI, 813905 (28 September 2011); doi: 10.1117/12.892987
Show Author Affiliations
S. Matsuyama, Osaka Univ. (Japan)
N. Kidani, Osaka Univ. (Japan)
H. Mimura, The Univ. of Tokyo (Japan)
J. Kim, Osaka Univ. (Japan)
Y. Sano, Osaka Univ. (Japan)
K. Tamasaku, RIKEN (Japan)
Y. Kohmura, RIKEN (Japan)
M. Yabashi, RIKEN (Japan)
T. Ishikawa, RIKEN (Japan)
K. Yamauchi, Osaka Univ. (Japan)


Published in SPIE Proceedings Vol. 8139:
Advances in X-Ray/EUV Optics and Components VI
Christian Morawe; Ali M. Khounsary; Shunji Goto, Editor(s)

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