Share Email Print
cover

Proceedings Paper

Behavioral modeling of monolithically integrated tri-axis capacitive accelerometer based on metal MUMPs
Author(s): Muhammad Shuja Khan; Abid A. Iqbal; Shafaat A. Bazaz
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Details

Date Published:
PDF
Proc. SPIE 8102, Nanoengineering: Fabrication, Properties, Optics, and Devices VIII, 81020I; doi: 10.1117/12.892986
Show Author Affiliations
Muhammad Shuja Khan, COMSATS Institute of Information Technology (Pakistan)
Abid A. Iqbal, Ghulam Ishaq Khan Institute of Engineering Science and Technology (Pakistan)
Shafaat A. Bazaz, Ghulam Ishaq Khan Institute of Engineering Science and Technology (Pakistan)


Published in SPIE Proceedings Vol. 8102:
Nanoengineering: Fabrication, Properties, Optics, and Devices VIII
Elizabeth A. Dobisz; Louay A. Eldada, Editor(s)

© SPIE. Terms of Use
Back to Top