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Proceedings Paper

Progress on the magnetic field-assisted finishing of MEMS micropore x-ray optics
Author(s): Raul E. Riveros; Michael A. Tan; Hitomi Yamaguchi; Ikuyuki Mitsuishi; Kensuke Ishizu; Teppei Moriyama; Tomohiro Ogawa; Yuichiro Ezoe; Mitsuhiro Horade; Susumu Sugiyama; Yoshiaki Kanamori; Noriko Yamasaki; Kazuhisa Mitsuda
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Paper Abstract

Microelectromechanical systems (MEMS) micropore X-ray optics were proposed as an ultralightweight, high- resolution, and low cost X-ray focusing optic alternative to the large, heavy and expensive optic systems in use today. The optic's monolithic design which includes high-aspect-ratio curvilinear micropores with minimal sidewall roughness is challenging to fabricate. When made by either deep reactive ion etching or X-ray LIGA, the micropore sidewalls (re ecting surfaces) exhibit unacceptably high surface roughness. A magnetic eld-assisted nishing (MAF) process was proposed to reduce the micropore sidewall roughness of MEMS micropore optics and improvements in roughness have been reported. At this point, the best surface roughness achieved is 3 nm Rq on nickel optics and 0.2 nm Rq on silicon optics. These improvements bring MEMS micropore optics closer to their realization as functional X-ray optics. This paper details the manufacturing and post-processing of MEMS micropore X-ray optics including results of recent polishing experiments with MAF.

Paper Details

Date Published: 12 October 2011
PDF: 10 pages
Proc. SPIE 8147, Optics for EUV, X-Ray, and Gamma-Ray Astronomy V, 814715 (12 October 2011); doi: 10.1117/12.892978
Show Author Affiliations
Raul E. Riveros, Univ. of Florida (United States)
Michael A. Tan, Univ. of Florida (United States)
Hitomi Yamaguchi, Univ. of Florida (United States)
Ikuyuki Mitsuishi, Japan Aerospace Exploration Agency (Japan)
Kensuke Ishizu, Tokyo Metropolitan Univ. (Japan)
Teppei Moriyama, Tokyo Metropolitan Univ. (Japan)
Tomohiro Ogawa, Tokyo Metropolitan Univ. (Japan)
Yuichiro Ezoe, Tokyo Metropolitan Univ. (Japan)
Mitsuhiro Horade, Ritsumeikan-Global Innovation Research Organization, Ritsumeikan Univ. (Japan)
Susumu Sugiyama, Ritsumeikan-Global Innovation Research Organization, Ritsumeikan Univ. (Japan)
Yoshiaki Kanamori, Tohoku Univ. (Japan)
Noriko Yamasaki, Japan Aerospace Exploration Agency (Japan)
Kazuhisa Mitsuda, Japan Aerospace Exploration Agency (Japan)

Published in SPIE Proceedings Vol. 8147:
Optics for EUV, X-Ray, and Gamma-Ray Astronomy V
Stephen L. O'Dell; Giovanni Pareschi, Editor(s)

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