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Proceedings Paper

High-resolution electric speckle pattern interferometry by using only two speckle patterns
Author(s): Y. Arai; T. Inoue; S. Yokozeki
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Paper Abstract

Electronic speckle pattern interferometry is a useful deformation measurement method. In this paper, new method that can measure the deformation by limited information without using much higher speed cameras is proposed. The optical system that can record some spatial information into each speckle of speckle pattern is set up by using basic characteristics of speckle that has never been used before. In experimental results, it is confirmed that the out-of-plane deformation measurement by using only two speckle patterns before and after the deformation can be precisely performed by this method and that the resolution-power of new method is almost equivalent to that of ordinary method.

Paper Details

Date Published: 14 September 2011
PDF: 8 pages
Proc. SPIE 8133, Dimensional Optical Metrology and Inspection for Practical Applications, 81330R (14 September 2011); doi: 10.1117/12.892967
Show Author Affiliations
Y. Arai, Kansai Univ. (Japan)
T. Inoue, Kansai Univ. (Japan)
S. Yokozeki, Jyouko Applied Optics Lab. (Japan)


Published in SPIE Proceedings Vol. 8133:
Dimensional Optical Metrology and Inspection for Practical Applications
Kevin G. Harding; Peisen S. Huang; Toru Yoshizawa, Editor(s)

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