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Proceedings Paper

Assessment of illumination characteristics of soft x-ray laser-based full-field microscopes
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Paper Abstract

We present a method for the optimization of the illumination in soft x-ray (SXR) full-field microscopes. The method consists of imaging a single periodic grating with a period large compared to the wavelength of the illumination and obtaining its Fourier spectrum in two orthogonal directions. The analysis of the cut-off frequency along the two perpendicular directions allows the identification of angled illumination, which can be corrected in-situ by using the Fourier analysis iteratively. The ability to characterize the illumination conditions and aberrations in the EUV/SXR microscopes with a fast and simple analysis is critical to achieve the best quality images with the highest spatial resolution.

Paper Details

Date Published: 6 October 2011
PDF: 5 pages
Proc. SPIE 8140, X-ray Lasers and Coherent X-ray Sources: Development and Applications IX, 81400W (6 October 2011); doi: 10.1117/12.892927
Show Author Affiliations
Isela D. Howlett, Colorado State Univ. (United States)
Fernando Brizuela, Colorado State Univ. (United States)
Sergio Carbajo, Colorado State Univ. (United States)
Diana Peterson, Colorado State Univ. (United States)
Anne Sakdinawat, Univ. of California, Berkeley (United States)
Colorado State Univ. (United States)
Yanwei Liu, Univ. of California, Berkeley (United States)
Colorado State Univ. (United States)
David T. Attwood, Univ. of California, Berkeley (United States)
Colorado State Univ. (United States)
Mario C. Marconi, Colorado State Univ. (United States)
Jorge J. Rocca, Colorado State Univ. (United States)
Carmen S. Menoni, Colorado State Univ. (United States)


Published in SPIE Proceedings Vol. 8140:
X-ray Lasers and Coherent X-ray Sources: Development and Applications IX
James Dunn; Annie Klisnick, Editor(s)

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