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Proceedings Paper

Radiation effects on multiple DOF MEMS inertial sensors
Author(s): Bill Dillard; Victor Trent; Michael Greene; Edward W. Taylor
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Paper Abstract

Much work has been conducted and published in the area of radiation hardening of electronics. These efforts have yielded an array of techniques and design protocols for mitigating radiation effects in hardware. However, in the field of MEMS sensor systems, radiation can impact not only the support structure but the MEMS structure itself. In this work, a new multiple degree-of-freedom MEMS inertial sensor called MARS (MEMS Annular Rotating Sensor) has been subjected to Co60 gamma-ray irradiation and results analyzed for total dose effects. Pre- and post-radiation tests reveal that the sensor's accelerometer noise performance is enhanced by the exposure. Quantitatively, noise levels improved after radiation by roughly 40% in the X and Y axes and 75% in the Z axes. Additionally, any effects of radiation on sensor offset were not discernable.

Paper Details

Date Published: 31 August 2011
PDF: 8 pages
Proc. SPIE 8164, Nanophotonics and Macrophotonics for Space Environments V, 81640R (31 August 2011); doi: 10.1117/12.892799
Show Author Affiliations
Bill Dillard, Archangel Systems, Inc. (United States)
Victor Trent, Archangel Systems, Inc. (United States)
Michael Greene, Archangel Systems, Inc. (United States)
Edward W. Taylor, International Photonics Consultants, Inc. (United States)


Published in SPIE Proceedings Vol. 8164:
Nanophotonics and Macrophotonics for Space Environments V
Edward W. Taylor; David A. Cardimona, Editor(s)

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