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Proceedings Paper

The fabrication of high filling factor double side micro lens array with high alignment accuracy
Author(s): Yuan-Chieh Cheng; Chun-Chieh Chen; Wei-Yao Hsu; Pei Jen Wang; Din Ping Tsai
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Paper Abstract

The high filling factor double side micro lens array (MLA) for laser beam shaping has been widely applied in optoelectrical applications. In this paper, we demonstrated the double side MLA for the laser beam shaping process. The point laser source has been successfully transformed into a two dimension uniformity light imaging. The ultra-precision slow tool servo (STS) diamond shaping and plastic injection method for MLA fabrication had been studied. The complexity micro structure of high filling factor MLA via the planning of cutting tool path is used in this research. The high alignment accuracy of both sides MLA is obtained by artful fixture design. The form accuracy and surface roughness are less than 0.1μm and 10nm, respectively. The alignment error of both sides MLA is less than 10μm.

Paper Details

Date Published: 27 September 2011
PDF: 7 pages
Proc. SPIE 8126, Optical Manufacturing and Testing IX, 812618 (27 September 2011); doi: 10.1117/12.892444
Show Author Affiliations
Yuan-Chieh Cheng, Instrument Technology Research Ctr. (Taiwan)
National Tsing Hua Univ. (Taiwan)
Chun-Chieh Chen, Instrument Technology Research Ctr. (Taiwan)
Wei-Yao Hsu, Instrument Technology Research Ctr. (Taiwan)
Pei Jen Wang, National Tsing Hua Univ. (Taiwan)
Din Ping Tsai, Instrument Technology Research Ctr. (Taiwan)
National Taiwan Univ. (Taiwan)

Published in SPIE Proceedings Vol. 8126:
Optical Manufacturing and Testing IX
James H. Burge; Oliver W. Fähnle; Ray Williamson, Editor(s)

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