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Proceedings Paper

Multi-probe system comprising three laser interferometers and one autocollimator for measuring flat bar mirror profile with nanometer accuracy on a high-precision micro-coordinate measuring machine
Author(s): Ping Yang; Tomohiko Takamura; Satoru Takahashi; Kiyoshi Takamasu; Osamu Sato; Sonko Osawa; Toshiyuki Takatsuji
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Paper Abstract

We described a multi-probe system comprising three laser interferometers and one autocollimator to measure a flat bar mirror profile with nanometer accuracy. The simulation and pre-experiment of multi-probe system have been conducted on an X-Y linear stage which is composed of a ball bearing slider and a stepping motor. The two standard deviation of the flat bar mirror profile is mainly fitting the range of simulation results (±20 nm). Comparison of our measured data with the results measured by ZYGO white light interferometer system showed agreement to within approximately ±30 nm, excluding some points at the edge of the mirror. From the pre-experiment results, we conclude that the systematic error caused by accuracy of the moving stage can't be ignored. To eliminate this systematic error, the multi-probe system has been implemented on a high-precision micro-coordinate measuring machine (M-CMM) that has been built at the Advanced Industrial Science and Technology (AIST).

Paper Details

Date Published: 14 September 2011
PDF: 9 pages
Proc. SPIE 8133, Dimensional Optical Metrology and Inspection for Practical Applications, 81330T (14 September 2011); doi: 10.1117/12.892385
Show Author Affiliations
Ping Yang, The Univ. of Tokyo (Japan)
Tomohiko Takamura, The Univ. of Tokyo (Japan)
Satoru Takahashi, The Univ. of Tokyo (Japan)
Kiyoshi Takamasu, The Univ. of Tokyo (Japan)
Osamu Sato, National Metrology Institute of Japan (Japan)
Sonko Osawa, National Metrology Institute of Japan (Japan)
Toshiyuki Takatsuji, National Metrology Institute of Japan (Japan)


Published in SPIE Proceedings Vol. 8133:
Dimensional Optical Metrology and Inspection for Practical Applications
Kevin G. Harding; Peisen S. Huang; Toru Yoshizawa, Editor(s)

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