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Proceedings Paper

MicroFinish Topographer: surface finish metrology for large and small optics
Author(s): Robert E. Parks
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Paper Abstract

The MicroFinish Topographer (MFT) is the result of an interest in directly measuring the surface roughness of large optics without the need for using replicas that may degrade the measurement data and that contaminate the surface. Once the MFT proved itself on large optics it was immediately suggested that a similar device should be designed for small optics. All this really took was turning the original MFT upside down and placing small specimens on a holder. This one device tests samples from 10 mm diameter to 10 m with phase measuring interferometry that does not need vibration isolation. Further, the MFT form factor makes it ideal for use in doing on-machine surface finish metrology.

Paper Details

Date Published: 27 September 2011
PDF: 7 pages
Proc. SPIE 8126, Optical Manufacturing and Testing IX, 81260D (27 September 2011); doi: 10.1117/12.892283
Show Author Affiliations
Robert E. Parks, Optical Perspectives Group, LLC (United States)


Published in SPIE Proceedings Vol. 8126:
Optical Manufacturing and Testing IX
James H. Burge; Oliver W. Fähnle; Ray Williamson, Editor(s)

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