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Proceedings Paper

Fabrication of gratings and optical diffractive elements on chalcogenide thin films
Author(s): Vadims Kolbjonoks; Vjaceslavs Gerbreders; Janis Teteris; Andrejs Bulanovs
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Paper Abstract

The electron beam (EB) induced changes in solubility of thin As-S-Se films have been studied. Optimal absorption current choice, nano structure relief and shape dependence on acceleration voltage discussed. The possibilities of practical use of these materials as resist for gratings and optical diffractive element production using EB. New results are presented that indicate chalcogenide glasses as promising electron beam resists.

Paper Details

Date Published: 26 July 2011
PDF: 6 pages
Proc. SPIE 8001, International Conference on Applications of Optics and Photonics, 80012P (26 July 2011); doi: 10.1117/12.892173
Show Author Affiliations
Vadims Kolbjonoks, Daugavpils Univ. (Latvia)
Vjaceslavs Gerbreders, Daugavpils Univ. (Latvia)
Janis Teteris, Latvian Univ. (Latvia)
Andrejs Bulanovs, Daugavpils Univ. (Latvia)

Published in SPIE Proceedings Vol. 8001:
International Conference on Applications of Optics and Photonics
Manuel Filipe Costa, Editor(s)

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