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Proceedings Paper

Intense blue-white luminescence from amorphous silicon oxycarbide (a-SiCxOy) thin films
Author(s): Vasileios Nikas; Spyros Gallis; Himani Suhag; Mengbing Huang; Alain E. Kaloyeros
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Paper Abstract

We report on blue-white luminescence from amorphous silicon oxycarbide a-SiCxOy≤1.68 (0.25<x<0.36) thin films, synthesized by thermal chemical vapor deposition (TCVD) process. The luminescence from SiCxOy was found to exhibit a broad band in the blue-violet to near infrared range (370 - 750 nm), visible to the naked eye in a bright room. The effects of carbon concentration (8.4 at.% < C < 13.6 at.%) in the material and post-deposition annealing treatments (Ar and forming gas 5% of H2 ambient up to 1100°C) on the observed luminescence were studied. The emission intensity slightly decreased with increasing carbon content but was appreciably enhanced in the samples following post-deposition annealing treatment in forming gas 5% of H2 ambient.

Paper Details

Date Published: 24 September 2011
PDF: 7 pages
Proc. SPIE 8123, Eleventh International Conference on Solid State Lighting, 812316 (24 September 2011); doi: 10.1117/12.891342
Show Author Affiliations
Vasileios Nikas, Univ. at Albany (United States)
Spyros Gallis, Univ. at Albany (United States)
Himani Suhag, Univ. at Albany (United States)
Mengbing Huang, Univ. at Albany (United States)
Alain E. Kaloyeros, Univ. at Albany (United States)


Published in SPIE Proceedings Vol. 8123:
Eleventh International Conference on Solid State Lighting
Matthew H. Kane; Christian Wetzel; Jian-Jang Huang, Editor(s)

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