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Proceedings Paper

Design and fabrication of micromechanical windmill for fluidic media based on SU-8 for using flow-meter
Author(s): Iman Sabri Alirezaei; Hamid Latifi; Mohammad Khalafi; Mohammadamir Ghaderi; Mohammadreza Riahi Dehkordi
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Proc. SPIE 8066, Smart Sensors, Actuators, and MEMS V, ; doi: 10.1117/12.890397
Show Author Affiliations
Iman Sabri Alirezaei, Shahid Beheshti University(SBU) (Iran, Islamic Republic of)
Hamid Latifi, Shahid Beheshti University(SBU) (Iran, Islamic Republic of)
Mohammad Khalafi, Shahid Beheshti University(SBU) (Iran, Islamic Republic of)
Mohammadamir Ghaderi, Shahid Beheshti University(SBU) (Iran, Islamic Republic of)
Mohammadreza Riahi Dehkordi, Shahid Beheshti University(SBU) (Iran, Islamic Republic of)


Published in SPIE Proceedings Vol. 8066:
Smart Sensors, Actuators, and MEMS V
Ulrich Schmid; José Luis Sánchez-Rojas; Monika Leester-Schaedel, Editor(s)

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