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Proceedings Paper

Three-dimensional refractive index and thickness distribution of thin film measurements through dynamic multiwavelength interferometry
Author(s): Kai Wu; Cheng-Chung Lee
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Paper Abstract

A vibration-insensitive interferometer with simple structure is proposed. Under normal incidence, both the reflection phase and magnitude of the thin film at different wavelengths were measured and utilized to calculate refractive index and thickness of the thin film. The experiment results showed the precisions were obviously increased after the phase measurements were added into analysis.

Paper Details

Date Published: 27 May 2011
PDF: 6 pages
Proc. SPIE 8082, Optical Measurement Systems for Industrial Inspection VII, 80820P (27 May 2011); doi: 10.1117/12.890255
Show Author Affiliations
Kai Wu, National Central Univ. (Taiwan)
Cheng-Chung Lee, National Central Univ. (Taiwan)


Published in SPIE Proceedings Vol. 8082:
Optical Measurement Systems for Industrial Inspection VII
Peter H. Lehmann; Wolfgang Osten; Kay Gastinger, Editor(s)

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