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Proceedings Paper

Low dispersion integrated Michelson interferometer on silicon on insulator for optical coherence tomography
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Paper Abstract

We present an integrated silicon Michelson interferometer for OCT fabricated with wafer scale deep UV lithography. Silicon waveguides of the interferometer are designed with GVD less than 50 ps/nm.km. The footprint of the device is 0.5 mm x 3 mm. The effect of sidewall roughness of silicon waveguides has been observed, possible solutions are discussed.

Paper Details

Date Published: 7 June 2011
PDF: 6 pages
Proc. SPIE 8091, Optical Coherence Tomography and Coherence Techniques V, 80910T (7 June 2011); doi: 10.1117/12.889920
Show Author Affiliations
Gunay Yurtsever, Ghent Univ. (Belgium)
Katarzyna Komorowska, Ghent Univ. (Belgium)
Roel Baets, Ghent Univ. (Belgium)


Published in SPIE Proceedings Vol. 8091:
Optical Coherence Tomography and Coherence Techniques V
Rainer A. Leitgeb; Brett E. Bouma, Editor(s)

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