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Proceedings Paper

Axicon metrology using high line density computer-generated holograms
Author(s): Jun Ma; Christof Pruss; Matthias Häfner; Rihong Zhu; Zhishan Gao; Caojin Yuan; Wolfgang Osten
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Paper Abstract

Axicon surfaces are widely used in nowadays optical engineering, requiring accurate metrology for these highly aspheric surfaces. In this contribution, we present a complete approach to determine the shape deviation of axicons in an absolute manner. The setup is an interferometric null configuration using a computer generated hologram (CGH) as null optics. We demonstrate an absolute shifting method and the calibration issues connected with measuring the absolute cone angle. Experimental results are shown for the metrology of a 90° cone angle sample.

Paper Details

Date Published: 26 May 2011
PDF: 11 pages
Proc. SPIE 8082, Optical Measurement Systems for Industrial Inspection VII, 80821I (26 May 2011); doi: 10.1117/12.889572
Show Author Affiliations
Jun Ma, Univ. Stuttgart (Germany)
Nanjing Univ. of Science & Technology (China)
Christof Pruss, Univ. Stuttgart (Germany)
Matthias Häfner, Univ. Stuttgart (Germany)
Rihong Zhu, Nanjing Univ. of Science & Technology (China)
Zhishan Gao, Nanjing Univ. of Science & Technology (China)
Caojin Yuan, Univ. Stuttgart (Germany)
Wolfgang Osten, Univ. Stuttgart (Germany)

Published in SPIE Proceedings Vol. 8082:
Optical Measurement Systems for Industrial Inspection VII
Peter H. Lehmann; Wolfgang Osten; Kay Gastinger, Editor(s)

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