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Proceedings Paper

3D high-speed profilometer for inspection of micro-manufactured transparent parts
Author(s): Dean M. Ljubicic; Brian W. Anthony
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Paper Abstract

In micro manufacturing (MEMS, polymer hot-embossing, polymer roll-to-roll imprint, etc.) precise micro and nano-sized features are distributed over large areas. In order to inspect for defects or employ statistical process control on micromanufactured parts, metrological instruments must collect data with submicron resolution at a rate fast enough to keep up with the pace of production. Commercial inspection instruments fall short on meeting these challenging demands. In this paper we detail the design, implementation, and results of an optical system build to provide real-time inspection for transparent polymer microfluidic devices. Our current hardware demonstrates 0.5 micron lateral resolution with 1 micron vertical resolution at a rate of 640,000 voxels per second. Furthermore we demonstrate the ability to measure vertical sidewalls. The tilted orientation of our camera system provides access to these typically hidden or eclipsed areas. We conclude the paper with a direct comparison of our instrument's capabilities against a white light interferometer and laser scanning profilometer. The data demonstrates the difference between the instruments' lateral and vertical resolution, data acquisition rate, and vertical sidewall measurement capabilities.

Paper Details

Date Published: 26 May 2011
PDF: 12 pages
Proc. SPIE 8082, Optical Measurement Systems for Industrial Inspection VII, 808211 (26 May 2011); doi: 10.1117/12.889564
Show Author Affiliations
Dean M. Ljubicic, Massachusetts Institute of Technology (United States)
Brian W. Anthony, Massachusetts Institute of Technology (United States)

Published in SPIE Proceedings Vol. 8082:
Optical Measurement Systems for Industrial Inspection VII
Peter H. Lehmann; Wolfgang Osten; Kay Gastinger, Editor(s)

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