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Proceedings Paper

Submicron displacements measurement by measuring autocorrelation of the transmission function of a grating
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Paper Abstract

When two similar gratings are superimposed, the transmission function of them varies with the displacement of one grating with respect to the other. The transmitted light intensity versus displacement is proportional to the autocorrelation of the transmission function of the gratings. In this paper, it is shown by measuring the latter function for gratings of pitches in order of a fraction of millimeter, submicron displacements can be measured. More precision is easily available by increasing the area of gratings and the detector gain. The presented technique is not expensive, complicated and sensitive to environmental vibrations.

Paper Details

Date Published: 27 May 2011
PDF: 7 pages
Proc. SPIE 8082, Optical Measurement Systems for Industrial Inspection VII, 80823O (27 May 2011); doi: 10.1117/12.889556
Show Author Affiliations
K. Madanipour, Amirkabir Univ. of Technology (Iran, Islamic Republic of)
M. T. Tavassoly, Univ. of Tehran (Iran, Islamic Republic of)


Published in SPIE Proceedings Vol. 8082:
Optical Measurement Systems for Industrial Inspection VII
Peter H. Lehmann; Wolfgang Osten; Kay Gastinger, Editor(s)

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