Share Email Print
cover

Proceedings Paper

AFM nanometrology interferometric system with the compensation of angle errors
Author(s): Jan Hrabina; Josef Lazar; Petr Klapetek; Ondrej Cip
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The contribution is oriented towards measuring in the nanoscale through local probe microscopy techniques, primarily the AFM microscopy. The need to make the AFM microscope a nanometrology tool not only the positioning of the tip has to be based on precise measurements but the traceability of the measuring technique has to be ensured up to the primary standard. This leads to the engagement of laser interferometric measuring methods. We present a improved design of the six-axes dimensional interferometric measurement tool for local probe microscopy stage nanopositioning with the compensation system of angle errors. The setup is powered with the help of a single-frequency frequency-doubled Nd:YAG laser which is stabilized by thermal frequency control locked to a Doppler-broadened absorption line in iodine. The laser stabilization technique is described together with comparison of frequency stability and angle errors compensation system performance.

Paper Details

Date Published: 27 May 2011
PDF: 6 pages
Proc. SPIE 8082, Optical Measurement Systems for Industrial Inspection VII, 80823U (27 May 2011); doi: 10.1117/12.889544
Show Author Affiliations
Jan Hrabina, Institute of Scientific Instruments of the ASCR, v.v.i. (Czech Republic)
Josef Lazar, Institute of Scientific Instruments of the ASCR, v.v.i. (Czech Republic)
Petr Klapetek, Czech Metrology Institute (Czech Republic)
Ondrej Cip, Institute of Scientific Instruments of the ASCR, v.v.i. (Czech Republic)


Published in SPIE Proceedings Vol. 8082:
Optical Measurement Systems for Industrial Inspection VII
Peter H. Lehmann; Wolfgang Osten; Kay Gastinger, Editor(s)

© SPIE. Terms of Use
Back to Top