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Proceedings Paper

Ab initio intensity distribution of diffusely scattered light from rough metallic surfaces
Author(s): J. A. Böhm; A. Vernes; M. J. Vellekoop
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Paper Abstract

Non-contacting characterisation of finished surface is commonly done by means of optical systems, e.g., 3D microscopy. In case of the confocal white light microscope the topography of the tribological surface is determined by measuring the intensity distribution of the reflected light. In this work the inter- and intra-layer contributions to the complex optical conductivity tensor are quantum mechanically (ab initio) calculated on the microscopic scale. Based on these complex optical layer-resolved conductivity tensors, the Maxwell equations are solved for a proper modeling of the visible light propagation trough and from a layered sample. Applied to semi-infinite bcc Fe/Fe(100), among others, the incidence dependence of the scattered light is also discussed for variously machined surfaces.

Paper Details

Date Published: 23 May 2011
PDF: 6 pages
Proc. SPIE 8083, Modeling Aspects in Optical Metrology III, 80830U (23 May 2011); doi: 10.1117/12.889489
Show Author Affiliations
J. A. Böhm, Austrian Ctr. of Competence for Tribology (Austria)
A. Vernes, Austrian Ctr. of Competence for Tribology (Austria)
Technische Univ. Wien (Austria)
M. J. Vellekoop, Technische Univ. Wien (Austria)

Published in SPIE Proceedings Vol. 8083:
Modeling Aspects in Optical Metrology III
Bernd Bodermann, Editor(s)

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