
Proceedings Paper
Improved geometry reconstruction and uncertainty evaluation for extreme ultraviolet (EUV) scatterometry based on maximum likelyhood estimationFormat | Member Price | Non-Member Price |
---|---|---|
$14.40 | $18.00 |
![]() |
GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. | Check Access |
Paper Abstract
The task of solving the inverse problem of scatterometry is considered. As a non-imaging indirect optical
metrology method the goal of scatterometry is, e.g., to reconstruct the absorber line profiles of lithography
masks, i.e., profile parameters such as line width, line height, and side-wall angle (SWA), from the measured
diffracted light pattern and to estimate their associated uncertainties. The impact of an appropriate choice of
the statistical model for the input data on the reconstructed profile parameters is demonstrated for EUV masks,
where light with wavelengths of about 13.5 nm is applied. The maximum likelihood method is proposed to
determine more reliable estimations of all model parameters, including the sought profile dimensions. Finally,
this alternative approach is applied to EUV measurement data and the results are compared to those obtained
by a conventional analysis.
Paper Details
Date Published: 23 May 2011
PDF: 10 pages
Proc. SPIE 8083, Modeling Aspects in Optical Metrology III, 80830N (23 May 2011); doi: 10.1117/12.889479
Published in SPIE Proceedings Vol. 8083:
Modeling Aspects in Optical Metrology III
Bernd Bodermann, Editor(s)
PDF: 10 pages
Proc. SPIE 8083, Modeling Aspects in Optical Metrology III, 80830N (23 May 2011); doi: 10.1117/12.889479
Show Author Affiliations
M.-A. Henn, Physikalisch-Technische Bundesanstalt (Germany)
H. Gross, Physikalisch-Technische Bundesanstalt (Germany)
F. Scholze, Physikalisch-Technische Bundesanstalt (Germany)
H. Gross, Physikalisch-Technische Bundesanstalt (Germany)
F. Scholze, Physikalisch-Technische Bundesanstalt (Germany)
C. Elster, Physikalisch-Technische Bundesanstalt (Germany)
M. Bär, Physikalisch-Technische Bundesanstalt (Germany)
M. Bär, Physikalisch-Technische Bundesanstalt (Germany)
Published in SPIE Proceedings Vol. 8083:
Modeling Aspects in Optical Metrology III
Bernd Bodermann, Editor(s)
© SPIE. Terms of Use
