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Proceedings Paper

Transmission sphere calibration and its current limits
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Paper Abstract

When testing the optical surface errors with an interferometer, it is always important to determine the residual errors in the interferometer optics. The calibration of reference optic for proper accuracy is very important issue if the precise phase measurement results are to be obtained using interferometer. A simple ball calibration method is discussed and the sufficient number of measurements for the ball averaging calibration is determined. Further we analysis some errors, which limit the performance of the calibration method by using a combination of both ray optics and wave optics approach.

Paper Details

Date Published: 27 May 2011
PDF: 8 pages
Proc. SPIE 8082, Optical Measurement Systems for Industrial Inspection VII, 80822L (27 May 2011); doi: 10.1117/12.889458
Show Author Affiliations
Pengqian Yang, Shanghai Institute of Optics and Fine Mechanics (China)
Max-Planck-Institut für Astronomie (Germany)
Graduate School of the Chinese Academy of Sciences (China)
Jia Xu, Shanghai Institute of Optics and Fine Mechanics (China)
Jianqiang Zhu, Shanghai Institute of Optics and Fine Mechanics (China)
Stefan Hippler, Max-Planck-Institut für Astronomie (Germany)


Published in SPIE Proceedings Vol. 8082:
Optical Measurement Systems for Industrial Inspection VII
Peter H. Lehmann; Wolfgang Osten; Kay Gastinger, Editor(s)

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