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Proceedings Paper

Development of traceability methodology for optical coherence tomography (OCT) using step height standard as calibration reference
Author(s): Iakyra B. Couceiro; Thiago Ferreira da Silva; Luiz V. G. Tarelho; Carlos L. S. Azeredo; Igor Malinovski; Hans P. H. Grieneisein; Wellington S. Barros; Giancarlo V. Faria; Jean P. von der Weid; Marcello M. Amaral; Marcus P. Raele; Anderson Z. de Freitas
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Paper Abstract

This paper presents a methodology for providing traceability to OCT measurements linked to Length SI unit. The link to primary length standard is provided by an interference microscope (IM). The chosen transfer standard was a step height gauge block. The results for IM and OCT showed good agreement for step height standards, such that the OCT will be able to perform reliable measurements of complex surface topographies and to ensure traceability to the length scale. The main uncertainty components were evaluated for the OCT system. In addition, OCT also was used for measuring a surface roughness standard -a depth standard - in order to test this methodology for round groove profiles. Results were found to be in good agreement with the calibration certificate.

Paper Details

Date Published: 27 May 2011
PDF: 10 pages
Proc. SPIE 8082, Optical Measurement Systems for Industrial Inspection VII, 80822P (27 May 2011); doi: 10.1117/12.889404
Show Author Affiliations
Iakyra B. Couceiro, INMETRO (Brazil)
Thiago Ferreira da Silva, INMETRO (Brazil)
Luiz V. G. Tarelho, INMETRO (Brazil)
Carlos L. S. Azeredo, INMETRO (Brazil)
Igor Malinovski, INMETRO (Brazil)
Hans P. H. Grieneisein, INMETRO (Brazil)
Wellington S. Barros, INMETRO (Brazil)
Giancarlo V. Faria, Pontificia Univ. Católica do Rio de Janeiro (Brazil)
Jean P. von der Weid, Pontificia Univ. Católica do Rio de Janeiro (Brazil)
Marcello M. Amaral, Instituto de Pesquisas Energéticas e Nucleares (Brazil)
Marcus P. Raele, Instituto de Pesquisas Energéticas e Nucleares (Brazil)
Anderson Z. de Freitas, Instituto de Pesquisas Energéticas e Nucleares (Brazil)


Published in SPIE Proceedings Vol. 8082:
Optical Measurement Systems for Industrial Inspection VII
Peter H. Lehmann; Wolfgang Osten; Kay Gastinger, Editor(s)

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