Share Email Print
cover

Proceedings Paper

Development of a FD-OCT for the inline process metrology in laser structuring systems
Author(s): Robert Schmitt; Guilherme Mallmann; Pavel Peterka
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Laser structuring is a rapidly developing manufacturing technique with long-term technological impact on future economics and ecological challenges. Due to its high process flexibility, the laser structuring system permits the structuring of different work pieces (different forms and structure complexity) with the same machine configuration. A crucial fact is the process knowledge and its control. The state of the art in laser structuring has however a crucial deficit. Present structuring systems contain no metrology setup to detect the shape geometry and contour accuracy before, during or after the structuring process. Therefore no result feedback to the machine can be accomplished and consequently a process control based on the real machined surface is not possible. In order to close this technology gap and assure an automated and robust manufacture process, a metrological system needs to be integrated to the process. In this work the concept and the development of an adjustable optical coherence tomography measuring system based on the analysis of the frequency domain (FD-OCT) with sub-micrometer accuracy for the in process measurement in a laser structuring machine is described. Goal of the research presented here is the development of the measuring system, with special focus on the spectrometer development (optical and software) and machine integration (optical and mechanical), as well as the development of an innovative wideband source based on amplified spontaneous emission (ASE) in ytterbium-doped double-clad fiber.

Paper Details

Date Published: 27 May 2011
PDF: 9 pages
Proc. SPIE 8082, Optical Measurement Systems for Industrial Inspection VII, 808228 (27 May 2011); doi: 10.1117/12.889365
Show Author Affiliations
Robert Schmitt, Fraunhofer Institute for Production Technology (Germany)
RWTH Aachen (Germany)
Guilherme Mallmann, Fraunhofer Institute for Production Technology (Germany)
Pavel Peterka, Institute of Photonics and Electronics (Czech Republic)


Published in SPIE Proceedings Vol. 8082:
Optical Measurement Systems for Industrial Inspection VII
Peter H. Lehmann; Wolfgang Osten; Kay Gastinger, Editor(s)

© SPIE. Terms of Use
Back to Top