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Proceedings Paper

Numerical noise reduction via diffraction for surface profiling interferometry
Author(s): Hidemitsu Toba; Shigeru Nakayama; Hideaki Homma; Takashi Gemma; Kiyoshi Uchikawa
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Paper Abstract

Phase profiles obtained by phase shifting interferometry often include undesirable concentric ripple-noises, like "bull's-eye patterns" which are caused by scattering from defects on surfaces of optical elements in interferometers. We propose a numerical technique for reducing these bull's-eye noises via numerical diffraction. This technique is applicable to phase data obtained from all types of interferometer, since it only needs the phase data itself. We experimentally demonstrate that this technique is effective in elimination of bull's-eye noises from interferometer data. This technique is applicable to the data obtained from digital holography as well.

Paper Details

Date Published: 26 May 2011
PDF: 6 pages
Proc. SPIE 8082, Optical Measurement Systems for Industrial Inspection VII, 80821Q (26 May 2011); doi: 10.1117/12.888918
Show Author Affiliations
Hidemitsu Toba, Nikon Corp. (Japan)
Shigeru Nakayama, Nikon Corp. (Japan)
Hideaki Homma, Nikon Corp. (Japan)
Takashi Gemma, Nikon Corp. (Japan)
Kiyoshi Uchikawa, Nikon Corp. (Japan)

Published in SPIE Proceedings Vol. 8082:
Optical Measurement Systems for Industrial Inspection VII
Peter H. Lehmann; Wolfgang Osten; Kay Gastinger, Editor(s)

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