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Proceedings Paper

Time-of-flight characterization of ZnO laser-generated plasma
Author(s): A. M. Mezzasalma; G. Mondio; L. Torrisi; F. Caridi
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Paper Abstract

A study of the laser ablation of a ZnO target has been carried out in vacuum, by using a Nd:Yag laser with a pulse duration of 3 ns, a wavelength of 532 nm and a maximum pulse energy of 150 mJ. The measurements of ablation yields, crater profiles and fast CCD plasma imaging allowed the evaluation of the plasma density. Time-of-flight (TOF) measurements have been also utilized to monitor the ion emission by using a special ion collector placed along the normal to the target surface. Coulomb-Boltzmann-shifted ion energy distributions have been obtained depending on the ions charge states. The plasma temperature was evaluated by such ion energy distributions of the experimental data. A special attention has been devoted to the ion acceleration processes due to the high electric fields generated inside the non-equilibrium plasma. The characterization of the latter and the deposition of ZnO thin films are correlated and discussed.

Paper Details

Date Published: 28 February 2011
PDF: 8 pages
Proc. SPIE 7996, Fundamentals of Laser-Assisted Micro- and Nanotechnologies 2010, 79960W (28 February 2011); doi: 10.1117/12.888781
Show Author Affiliations
A. M. Mezzasalma, Univ. degli Studi di Messina (Italy)
INFN (Italy)
G. Mondio, Univ. degli Studi di Messina (Italy)
INFN (Italy)
L. Torrisi, INFN (Italy)
Univ. degli Studi di Messina (Italy)
F. Caridi, INFN (Italy)
Univ. degli Studi di Messina (Italy)


Published in SPIE Proceedings Vol. 7996:
Fundamentals of Laser-Assisted Micro- and Nanotechnologies 2010
Vadim P. Veiko; Tigran A. Vartanyan, Editor(s)

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