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Proceedings Paper

Laser inspection for surface acoustic wave performance in SAW device
Author(s): Jun Oh Park; Won Kweon Jang
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Paper Abstract

We suggested a laser inspection method of interference and diffraction for checking if any defect in a RF device such as SAW filter and delay line. The real time optical metrology that we proposed can provide a visualized positional vibration, unlike the electric method that is capable of checking only product defect. It can substitute a conventional test method of electrical with finding out where the vibration is weak or disturbed by other service frequency module. The measuring limits with a single-mode laser source are also given and what measuring conditions should be satisfied for detecting a fine displacement or vibration like propagation of a surface acoustic wave in RF device. The interference and diffraction due to RF signal are analyzed by an optical interpretation. In this paper, a single mode laser and a 105MHz-center- frequency repeater filter were employed for experiments and theoretical analysis. The optical metrology providing visual energy distribution and real time inspection for surface acoustic wave is proposed for development of high quality multi-service and multi-frequency RF module.

Paper Details

Date Published: 3 January 2011
PDF: 6 pages
Proc. SPIE 7990, Optical Sensors and Biophotonics II, 79900E (3 January 2011); doi: 10.1117/12.888685
Show Author Affiliations
Jun Oh Park, Hanseo Univ. (Korea, Republic of)
Won Kweon Jang, Hanseo Univ. (Korea, Republic of)


Published in SPIE Proceedings Vol. 7990:
Optical Sensors and Biophotonics II
Qingming Luo; Frank Chuang; Stefan Haacke; Chih-Chung Yang, Editor(s)

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