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Proceedings Paper

Erbium silicide nanostructures self-assembled on Si(001) by cyclic growth
Author(s): Tao Ding; Junqiang Song; Juan Li; Qun Cai
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Paper Abstract

Erbium silicide nanostructures were self assembled on the Si(001) substrates by novel multiple deposition and annealing steps. In-situ scanning probe microscopy (SPM) and ex-situ scanning electron microscopy (SEM) were used to characterize the morphology of the nanostructures. Compared with traditional growth method, it was found that ErSi2 nanostructures fabricated by cyclic growth could keep stable morphology avoiding the shape instability. Besides, both the size and distribution density could be well controlled, which have significance in the application of nanostructures.

Paper Details

Date Published: 18 February 2011
PDF: 4 pages
Proc. SPIE 7995, Seventh International Conference on Thin Film Physics and Applications, 79952A (18 February 2011); doi: 10.1117/12.888533
Show Author Affiliations
Tao Ding, Tongji Univ. (China)
Junqiang Song, Fudan Univ. (China)
Juan Li, Fudan Univ. (China)
Qun Cai, Fudan Univ. (China)

Published in SPIE Proceedings Vol. 7995:
Seventh International Conference on Thin Film Physics and Applications
Junhao Chu; Zhanshan Wang, Editor(s)

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