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Proceedings Paper

Multilayer coatings for optics in the extreme ultraviolet
Author(s): Juan I. Larruquert; Manuela Vidal-Dasilva; Sergio García-Cortés; Luis Rodríguez-de Marcos; Mónica Fernández-Perea; José A. Aznárez; José A. Méndez
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Paper Abstract

The strong absorption of materials in the extreme ultraviolet (EUV) above ~50 nm has precluded the development of efficient coatings. The development of novel coatings with improved EUV performance is presented. An extensive research was performed on the search and characterization of new materials with low absorption or high reflectance. Lanthanide series was found to be a source of materials with relatively low absorption in this range, where most materials in nature present a strong absorption. Other materials, such as SiO and B, have been found to have interesting properties for applications on EUV coatings. As a result, novel multilayers based on Yb, Al, and SiO have been developed with narrowband performance in the 50-92 nm range. In some cases, the difficulty of developing narrowband coatings in the EUV can be overcome by designing multilayers that address specific purposes, such as maximizing and/or minimizing the reflectance at two or more wavelengths or bands. In this direction, we are working towards the development of coatings that combine a relatively high reflectance in a desired EUV band with a low reflectance in another band, for applications in which the presence of the latter radiation may mask a weak EUV radiation source.

Paper Details

Date Published: 18 February 2011
PDF: 6 pages
Proc. SPIE 7995, Seventh International Conference on Thin Film Physics and Applications, 79952S (18 February 2011); doi: 10.1117/12.888463
Show Author Affiliations
Juan I. Larruquert, Consejo Superior de Investigaciones Científicas (Spain)
Manuela Vidal-Dasilva, Consejo Superior de Investigaciones Científicas (Spain)
Sergio García-Cortés, Consejo Superior de Investigaciones Científicas (Spain)
Luis Rodríguez-de Marcos, Consejo Superior de Investigaciones Científicas (Spain)
Mónica Fernández-Perea, Consejo Superior de Investigaciones Científicas (Spain)
Lawrence Livermore National Lab. (United States)
José A. Aznárez, Consejo Superior de Investigaciones Científicas (Spain)
José A. Méndez, Consejo Superior de Investigaciones Científicas (Spain)


Published in SPIE Proceedings Vol. 7995:
Seventh International Conference on Thin Film Physics and Applications
Junhao Chu; Zhanshan Wang, Editor(s)

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