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Proceedings Paper

Novel periodic microstructures fabricated by multi-exposure two-beam interference lithography
Author(s): Yinbing Bai; A. Ping Zhang
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Paper Abstract

We present some novel periodic structures with different internal nanopatterns based on multi-exposure two-beam interference lithography. Two-dimensional quasi-crystal structures are fabricated with precisely control of exposure directions and doses as well as the total number of exposures. Experimental fabrication of microstructures are demonstrated and comparied with numerical simulations of intensity distributions. The size of the fabricated samples is around 1 square centimeter. The diffraction spectra of the fabricated samples are measured and tested. The experiment results show such a fabrication technology is very promising for making diverse large-area microstructures with complex internal nanopatterns.

Paper Details

Date Published: 3 January 2011
PDF: 8 pages
Proc. SPIE 7990, Optical Sensors and Biophotonics II, 799006 (3 January 2011); doi: 10.1117/12.888450
Show Author Affiliations
Yinbing Bai, Zhejiang Univ. (China)
A. Ping Zhang, Zhejiang Univ. (China)


Published in SPIE Proceedings Vol. 7990:
Optical Sensors and Biophotonics II
Qingming Luo; Frank Chuang; Stefan Haacke; Chih-Chung Yang, Editor(s)

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