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Proceedings Paper

Multisensor technology based on a laser focus probe for nanomeasuring applications over large areas
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Paper Abstract

Due to the development and progress in micro- and nanotechnology the range of measuring tasks is becoming ever more varied and multifaceted. Decreasing structure widths in combination with large area measurements or complex 3D-micro- and nanostructures with high aspect ratios not only on flat but also on curved surfaces are some of these measurement challenges. In order to solve the problems arising within this application spectrum a multi-sensor platform based on a laser focus probe was developed. This platform is integrated in the Nanopositioning and Nanomeasuring Machine developed mainly at the Institute of Process Measurement and Sensor Technology at the Ilmenau University of Technology with a measuring range of 25 mm x 25 mm x 5 mm and subnanometre resolution.

Paper Details

Date Published: 26 May 2011
PDF: 9 pages
Proc. SPIE 8082, Optical Measurement Systems for Industrial Inspection VII, 808203 (26 May 2011); doi: 10.1117/12.888445
Show Author Affiliations
Eberhard Manske, Ilmenau Univ. of Technology (Germany)
Gerd Jäger, Ilmenau Univ. of Technology (Germany)
Tino Hausotte, Ilmenau Univ. of Technology (Germany)
Torsten Machleidt, Ilmenau Univ. of Technology (Germany)

Published in SPIE Proceedings Vol. 8082:
Optical Measurement Systems for Industrial Inspection VII
Peter H. Lehmann; Wolfgang Osten; Kay Gastinger, Editor(s)

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