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Proceedings Paper

Analysis of the measured method for scattering properties of high-reflection coating
Author(s): Huasong Liu; Zheng Luo; Zhanshan Wang; Yiqin Ji; Yongkai Fan; Rongwei Fan
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Paper Abstract

Integral scattering is one of the important loss components of high-reflection optical thin films, so suppressing integral scattering can enhance the reflectance of high-reflection coating. Using integrating sphere is the important method of the integral scattering measurement of high reflection coatings. The paper introduced the measurement method and apparatus of integral scattering for single-wavelength at incident angle of 45deg by analyzing the principle of integrating sphere. Besides the important error sources and measurement accuracy of the integral scattering were analyzed. High-reflection coating for single wavelength onto fused silica substrate at incident angle of 45deg was manufactured by ion beam sputtering deposition and integral scattering apparatus was used to measure integral scattering of high-reflection coating. Finally by comparison of the experimental result and the value of scattering theory, we achieved the practical measurement errors origin that and established the foundation of scattering loss analysis for the ultra low losses high-reflection coating.

Paper Details

Date Published: 18 February 2011
PDF: 4 pages
Proc. SPIE 7995, Seventh International Conference on Thin Film Physics and Applications, 799529 (18 February 2011); doi: 10.1117/12.888309
Show Author Affiliations
Huasong Liu, Tongji Univ. (China)
Jinhang Institute of Technical Physics (China)
Zheng Luo, Jinhang Institute of Technical Physics (China)
Zhanshan Wang, Tongji Univ. (China)
Yiqin Ji, Jinhang Institute of Technical Physics (China)
Harbin Institute of Technology (China)
Yongkai Fan, Harbin Institute of Technology (China)
Rongwei Fan, Harbin Institute of Technology (China)


Published in SPIE Proceedings Vol. 7995:
Seventh International Conference on Thin Film Physics and Applications
Junhao Chu; Zhanshan Wang, Editor(s)

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