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Proceedings Paper

Mg/B4C EUV multilayer by introducing Co as barrier layer
Author(s): Haochuan Li; Sika Zhou; Qiushi Huang; Moyan Tan; Li Jiang; Jingtao Zhu; Xiaoqiang Wang; Fengli Wang; Zhong Zhang; Zhanshan Wang; Lingyan Chen
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Paper Abstract

Mg/B4C multilayer provides very high theoretical reflectivity in extreme ultraviolet range near 30.4nm wavelength, while the interface between Mg and B4C layer is very poor. In this paper, Co was introduced into the interface between Mg and B4C as a barrier layer. Mg/B4C and Co/Mg/Co/B4C multilayers were designed, fabricated, and measured for the wavelength of 30.4nm. The thickness of Co barrier layer was optimized. Grazing incidence x-ray reflectance measurements show that the structural quality of Co/Mg/Co/B4C multilayer is improved significantly after Co barrier layer inserting, and the optimum thickness of the barrier layer is 1.5nm.

Paper Details

Date Published: 18 February 2011
PDF: 4 pages
Proc. SPIE 7995, Seventh International Conference on Thin Film Physics and Applications, 79951E (18 February 2011); doi: 10.1117/12.888272
Show Author Affiliations
Haochuan Li, Tongji Univ. (China)
Sika Zhou, Tongji Univ. (China)
Qiushi Huang, Tongji Univ. (China)
Moyan Tan, Tongji Univ. (China)
Li Jiang, Tongji Univ. (China)
Jingtao Zhu, Tongji Univ. (China)
Xiaoqiang Wang, Tongji Univ. (China)
Fengli Wang, Tongji Univ. (China)
Zhong Zhang, Tongji Univ. (China)
Zhanshan Wang, Tongji Univ. (China)
Lingyan Chen, Tongji Univ. (China)


Published in SPIE Proceedings Vol. 7995:
Seventh International Conference on Thin Film Physics and Applications
Junhao Chu; Zhanshan Wang, Editor(s)

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