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Proceedings Paper

Surface figure control for optical filters in fluorescence microscopy
Author(s): Yi Cao; Lin Tang; Shuaifeng Zhao; Yongxi Zhang; Jing Ma; Xiaojun Yin; Shuguo Fei
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Paper Abstract

The request of fluorescence microscopy filters was introduced. Optimized filter construction which requires more than 100 layers stack on both sides was redesigned. Surface deformation of filters caused by stress of multi-layers film was studied. The stress deformation effected by different film material and thickness was analyzed. A new flatten surface method was used to improve the surface flatness to 0.25λ. Filter sets were manufactured and photomicrograph was obtained with high contrast and no deformations when these filter sets were applied in fluorescence microscopy.

Paper Details

Date Published: 18 February 2011
PDF: 7 pages
Proc. SPIE 7995, Seventh International Conference on Thin Film Physics and Applications, 79951Z (18 February 2011); doi: 10.1117/12.888215
Show Author Affiliations
Yi Cao, HB Optical Technology Co., Ltd. (China)
Lin Tang, Alantek International (United States)
Shuaifeng Zhao, HB Optical Technology Co., Ltd. (China)
Yongxi Zhang, HB Optical Technology Co., Ltd. (China)
Jing Ma, HB Optical Technology Co., Ltd. (China)
Xiaojun Yin, HB Optical Technology Co., Ltd. (China)
Shuguo Fei, Shenyang Academy of Instrumentation Science (China)


Published in SPIE Proceedings Vol. 7995:
Seventh International Conference on Thin Film Physics and Applications
Junhao Chu; Zhanshan Wang, Editor(s)

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