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Proceedings Paper

Optical properties of Ni(1-x)Mn(2+x)O4 films studied by spectroscopic ellipsometry
Author(s): Leibo Zhang; Yun Hou; Zhiming Huang; Wei Zhou; Yanqing Gao
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Paper Abstract

Transition metal oxide (TMO) has been extensively focused in recent years. In this paper, we investigate the optical properties of a typical TMO material of Ni(1-x)Mn(2+x)O4 (x=0-1) thin films. Different compositions of x=0, 0.1, 0.2, 0.3 thin films are grown on Pt/Ti/SiO2/Si substrates by chemical solution deposition method under annealing temperature of 750°C. X-ray diffraction patterns indicate that Ni(1-x)Mn(2+x)O4 thin films are polycrystalline with spinel structure. The optical properties are investigated using spectroscopic ellipsometry at room temperature in the wavelength range of 400-1700nm. By fitting the measured ellipsometric data with a three-phase model (air/sample/Pt), the optical constants of thin films are determined. The refractive index and extinction coefficient don't show apparent variation with different composition. The obtained optical constants are very significant in the potential applications of optoelectronic devices.

Paper Details

Date Published: 18 February 2011
PDF: 6 pages
Proc. SPIE 7995, Seventh International Conference on Thin Film Physics and Applications, 79950J (18 February 2011); doi: 10.1117/12.888207
Show Author Affiliations
Leibo Zhang, Shanghai Institute of Technical Physics (China)
Yun Hou, Shanghai Institute of Technical Physics (China)
Zhiming Huang, Shanghai Institute of Technical Physics (China)
Wei Zhou, Shanghai Institute of Technical Physics (China)
Yanqing Gao, Shanghai Institute of Technical Physics (China)


Published in SPIE Proceedings Vol. 7995:
Seventh International Conference on Thin Film Physics and Applications
Junhao Chu; Zhanshan Wang, Editor(s)

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