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Proceedings Paper

Comparative investigation of infrared optical absorption properties of silicon oxide, oxynitride and nitride films
Author(s): Shun Zhou; Weiguo Liu; Changlong Cai; Huan Liu
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Paper Abstract

Amorphous silicon oxide, silicon oxynitride and silicon nitride films were deposited in a PECVD reactor using silane (SiH4),ammonia (NH3) and nitrous oxide (N2O) as precursor gases. The N2O/NH3 flow ratio was varied in order to obtain different oxynitride compositions. The films were characterized by spectroscopic ellipsometry, XPS and FTIR spectroscopy. The compositions and infrared optical absorption properties of the three different types of films were investigated and compared. Special attention was paid to analyze the Si-O/Si-N bond stretching absorption including the absorption band intensity. It was found that the silicon oxynitride films show a dominant infrared stretching band due to the Si-O/Si-N bond , with the infrared absorption peak located between 860cm-1(11.6μm) for Si-N bond in silicon nitride and 1063cm-1(9.4μm) for Si-O bond in silicon oxide. The position of peak also shifts to a shorter wavelength when increasing the N2O/NH3 flow ratio. The infrared optical absorption properties of the silicon oxynitride films make them well suited for the absorber of uncooled microbolometer detectors

Paper Details

Date Published: 18 February 2011
PDF: 4 pages
Proc. SPIE 7995, Seventh International Conference on Thin Film Physics and Applications, 79950T (18 February 2011); doi: 10.1117/12.888194
Show Author Affiliations
Shun Zhou, Xi'an Technological Univ. (China)
Xidian Univ. (China)
Weiguo Liu, Xi'an Technological Univ. (China)
Xidian Univ. (China)
Changlong Cai, Xi'an Technological Univ. (China)
Huan Liu, Xi'an Technological Univ. (China)


Published in SPIE Proceedings Vol. 7995:
Seventh International Conference on Thin Film Physics and Applications
Junhao Chu; Zhanshan Wang, Editor(s)

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