Share Email Print
cover

Proceedings Paper

Introduction of Zr in Mg/Co nanometric periodic multilayers
Author(s): Karine Le Guen; Min-Hui Hu; Jean-Michel André; Philippe Jonnard; Sika Zhou; Haochuan Li; Jingtao Zhu; Zhanshan Wang; Nicola Mahne; Angelo Giglia; Stefano Nannarone; Christian Meny
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

We study the introduction of Zr as a third material within a nanometric periodic Mg/Co structure designed to work as optical component in the EUV range. Mg/Co, Mg/Zr/Co, Mg/Co/Zr and Mg/Zr/Co/Zr multilayers are designed, then characterized in terms of structural quality and optical performances through X-ray and EUV reflectometry measurements respectively. For the Mg/Co/Zr structure, the reflectance value is reported to be 50% at 25.1 nm and 45° of grazing incidence. Nuclear Magnetic Resonance (NMR) measurements are performed to study the nearest neighbour local environment around the Co atoms.

Paper Details

Date Published: 18 February 2011
PDF: 5 pages
Proc. SPIE 7995, Seventh International Conference on Thin Film Physics and Applications, 799525 (18 February 2011); doi: 10.1117/12.888193
Show Author Affiliations
Karine Le Guen, Lab. de Chimie Physique-Matière et Rayonnement, CNRS, Univ. Pierre et Marie Curie (France)
Min-Hui Hu, Lab. de Chimie Physique-Matière et Rayonnement, CNRS, Univ. Pierre et Marie Curie (France)
Jean-Michel André, Lab. de Chimie Physique-Matière et Rayonnement, CNRS, Univ. Pierre et Marie Curie (France)
Philippe Jonnard, Lab. de Chimie Physique-Matière et Rayonnement, CNRS, Univ. Pierre et Marie Curie (France)
Sika Zhou, Tongji Univ. (China)
Haochuan Li, Tongji Univ. (China)
Jingtao Zhu, Tongji Univ. (China)
Zhanshan Wang, Tongji Univ. (China)
Nicola Mahne, Istituto Officina dei Materiali, CNR, Lab. TASC (Italy)
Angelo Giglia, Istituto Officina dei Materiali, CNR, Lab. TASC (Italy)
Stefano Nannarone, Istituto Officina dei Materiali, CNR, Lab. TASC (Italy)
Christian Meny, Institut de Physique et Chimie des Matériaux de Strasbourg, CNRS, Univ. de Strasbourg (France)


Published in SPIE Proceedings Vol. 7995:
Seventh International Conference on Thin Film Physics and Applications
Junhao Chu; Zhanshan Wang, Editor(s)

© SPIE. Terms of Use
Back to Top