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Proceedings Paper

Effects of technological parameters on microstructure and properties of CrAlN coating deposited by DC magnetron sputtering
Author(s): Lihong Yang; Kangpei Zheng; Ping Liu; Wei Li
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Paper Abstract

In this paper, the deposition processes of CrAlN coatings on high speed steel (M2) substrate was mainly researched, which made by reactive direct current (DC) magnetron sputtering with AlCr alloy target. The effects of technological parameters (Ar/N2 flow ratio, gas pressure and substrate temperature) on the microstructure and properties of CrAlN coatings were systematically studied with scanning electron microscopy (SEM), X-ray diffraction (XRD), energy dispersive spectrum (EDS) and nano-indentation techniques. The results indicated that Ar/N2 flow rate, gas pressure and substrate temperature greatly influenced the microstructure and properties of CrAlN coatings. With Ar/N2 flow ratio of 1, gas pressure of 0.2Pa and substrate temperature of 300°C, the hardness and elastic modulus of CrAlN coating were 34.8GPa and 434.3GPa respectively.

Paper Details

Date Published: 24 May 2011
PDF: 8 pages
Proc. SPIE 7997, Fourth International Seminar on Modern Cutting and Measurement Engineering, 79970M (24 May 2011); doi: 10.1117/12.888040
Show Author Affiliations
Lihong Yang, Univ. of Shanghai for Science and Technology (China)
Kangpei Zheng, Univ. of Shanghai for Science and Technology (China)
Ping Liu, Univ. of Shanghai for Science and Technology (China)
Wei Li, Univ. of Shanghai for Science and Technology (China)


Published in SPIE Proceedings Vol. 7997:
Fourth International Seminar on Modern Cutting and Measurement Engineering

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