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Proceedings Paper

Laser terahertz emission microscope
Author(s): Masayoshi Tonouchi; Sunmi Kim; Iwao Kawayama; Hironaru Murakami
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Paper Abstract

Recent progress of laser terahertz (THz) emission microscope (LTEM) is reviewed.Femtosecond lasers can excite the THz waves in various electronic materials due to ultrafast current modulation. The current modulation is realized by acceleration or deceleration of photo-excited carriers, and thus LTEM visualizes dynamic photo-response of substances. The developed systems have a minimum spatial resolution better than 1.0 μm, which is defined by the laser beam diameter. We alos provide esamples of LTEM application to material science and semiconductor devise failure.

Paper Details

Date Published: 25 May 2011
PDF: 7 pages
Proc. SPIE 8023, Terahertz Physics, Devices, and Systems V: Advance Applications in Industry and Defense, 80230Q (25 May 2011); doi: 10.1117/12.887937
Show Author Affiliations
Masayoshi Tonouchi, Osaka Univ. (Japan)
Sunmi Kim, Osaka Univ. (Japan)
Iwao Kawayama, Osaka Univ. (Japan)
Hironaru Murakami, Osaka Univ. (Japan)


Published in SPIE Proceedings Vol. 8023:
Terahertz Physics, Devices, and Systems V: Advance Applications in Industry and Defense
Mehdi Anwar; Nibir K. Dhar; Thomas W. Crowe, Editor(s)

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